# | Class | status | |
---|---|---|---|
1 |
S:76689565
M:GALILEO O:CARL ZEISS SMT GMBH, PIXER TECHNOLOGY INC. |
9 | Dead |
2 |
S:76689566
M:CDC200 O:CARL ZEISS SMT GMBH, PIXER TECHNOLOGY INC. |
7 | Dead |